Publication:
Vibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterization
Date
| dc.contributor.author | Clemente, Francesca | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-17T21:38:00Z | |
| dc.date.available | 2021-10-17T21:38:00Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15115 | |
| dc.source.beginpage | D1.10 | |
| dc.source.conference | MRS Spring Meeting Symposium D: Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics | |
| dc.source.conferencedate | 13/04/2009 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Vibrational spectroscopy of low-k films: exploring the potentiality of μ-Raman characterization | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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