Publication:

On the activation mechanisms of sub-melt laser anneals

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorClarysse, Trudo
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorMoussa, Alain
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPetersen, D.H.
dc.contributor.authorLin, R.
dc.contributor.authorNielsen, P.F.
dc.contributor.authorHansen, O.
dc.contributor.authorDefranoux, C.
dc.contributor.authorVertikov, A.
dc.contributor.authorGostein, M.
dc.contributor.authorBennett, N.S.
dc.contributor.authorCowern, N.E.B.
dc.contributor.authorFaifer, V.N.
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-17T06:34:26Z
dc.date.available2021-10-17T06:34:26Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13538
dc.source.conferenceE-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices
dc.source.conferencedate26/05/2008
dc.source.conferencelocationStrasbourg France
dc.title

On the activation mechanisms of sub-melt laser anneals

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
16438.pdf
Size:
15.73 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions