Publication:

E-beam metrology-based EUVL aberration monitoring

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2615955

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Author(s)

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Maruyama, Kotaro

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Yamazaki, Yuichiro

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Fenger, Germain

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De Bisschop, Peter

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Journal

Proceedings of SPIE

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1284 since deposited on 2022-09-08

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Acq. date: 2026-05-19