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Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures
Publication:
Elastic relaxation evaluation in SiGe/Si hetero-epitaxial structures
Date
2011
Meeting abstract
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23063.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bargallo Gonzalez, Mireia
;
Naka, N.
;
Hikavyy, Andriy
;
Eneman, Geert
;
Loo, Roger
;
Simoen, Eddy
;
Claeys, Cor
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Abstract
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1921
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Acq. date: 2025-10-24
Citations
Metrics
Views
1921
since deposited on 2021-10-19
430
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations