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Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnects

Date

2014-12
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department83f90257-8234-4909-a6c7-afd6a4b24a02
cris.virtualsource.orcid83f90257-8234-4909-a6c7-afd6a4b24a02
dc.contributor.advisorVereecken, Philippe
dc.contributor.advisorDe Gendt, Stefan
dc.contributor.authorVanpaemel, Johannes
dc.date.accessioned2026-05-28T14:39:48Z
dc.date.available2026-05-28T14:39:48Z
dc.date.issued2014-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59477
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnects

dc.typePHD thesis
dspace.entity.typePublication
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