Pilot-Line Ready Fabrication Process of High Aspect Ratio Nanoneedles for Bio-medical Applications

Abstract

Cell-targeted drug delivery is a crucial aspect of modern-day medicine which ensures optimal utilization of implemented therapeutic agents. Nanoneedles has been touted as an ideal vehicle for cellular drug delivery owing to their small diameter (sub-100 nm), which once coated with target payload, can be introduced into cell of interest without risking cyto-toxicity. Because of their fragile nature, wafer-level fabrication process for such high aspect ratio nanoneedles is a challenge. In this study, we present fabrication scheme of a two-step needle with total height of 30 um and aspect ratio of over 30 for the narrow part (tip) of the needle. This fabrication was done in a running 200 mm pilot line and exhibited high wafer level yield