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Articles
Barriers for Cu/low k damascene structures
Publication:
Barriers for Cu/low k damascene structures
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Date
2001
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31574.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maex, Karen
;
Tokei, Zsolt
;
Satta, Alessandra
;
Lanckmans, Filip
;
Wu, Wen
;
Iacopi, Francesca
Journal
Semiconductor Fabtech
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2016
since deposited on 2021-10-14
Acq. date: 2026-01-26
Citations
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Views
2016
since deposited on 2021-10-14
Acq. date: 2026-01-26
Citations