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A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Date

2019
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dc.contributor.authorPadovani, Andrea
dc.contributor.authorKaczer, Ben
dc.contributor.authorPesic, Milan
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorNyns, Laura
dc.contributor.authorLinten, Dimitri
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorShlyakhov, Ilya
dc.contributor.authorLee, Younggon
dc.contributor.authorPark, Hokyung
dc.contributor.authorLarcher, Luca
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorShlyakhov, Ilya
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.date.accessioned2021-10-27T15:17:14Z
dc.date.available2021-10-27T15:17:14Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33720
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8660699
dc.source.beginpage1892
dc.source.endpage1998
dc.source.issue4
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume66
dc.title

A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

dc.typeJournal article
dspace.entity.typePublication
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