Publication:
Metrology for sub-45nm and nanotechnology
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T06:33:23Z | |
| dc.date.available | 2021-10-16T06:33:23Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11463 | |
| dc.source.conference | TSMC | |
| dc.source.conferencedate | 17/01/2005 | |
| dc.source.conferencelocation | Taiwan | |
| dc.title | Metrology for sub-45nm and nanotechnology | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |