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A study of the influence of typical wet chemical treatments on the germanium wafer surface

Date

2004
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dc.contributor.authorOnsia, Bart
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorMertens, Paul
dc.contributor.authorMeuris, Peter
dc.contributor.authorRaskin, G.
dc.contributor.authorSioncke, Sonja
dc.contributor.authorTeerlinck, I
dc.contributor.authorTheuwis, A.
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorVinckier, Chris
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-15T15:11:25Z
dc.date.available2021-10-15T15:11:25Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9368
dc.source.conference7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate20/09/2004
dc.source.conferencelocationBrussels Belgium
dc.title

A study of the influence of typical wet chemical treatments on the germanium wafer surface

dc.typeOral presentation
dspace.entity.typePublication
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