Publication:

Integration aspects of post-porosity low-k protection using PMMA sacrificial filler

Date

2016

Meeting abstract

Simple item page Full metadata Statistics

Files

33310.pdf 852.64 KB

Author(s)

;

de Marneffe, Jean-Francois

;

Wen, Liang Gong

;

;

;

Boemmels, Juergen

;

De Gendt, Stefan

;

Baklanov, Mikhaïl

Statistics

1957 since deposited on 2021-10-23

Acq. date: 2026-04-26