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Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis
Publication:
Roughness analysis of lithographically produced nanostructures: off-line measurement and scaling analysis
Date
2003
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Patsis, G.P.
;
Constantoudis, V.
;
Tserepi, A.
;
Gogolides, E.
;
Grozev, Grozdan
;
Hoffmann, Thomas
Journal
Microelectronic Engineering
Abstract
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1895
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1895
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations