Publication:
Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGe
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2048 since deposited on 2021-10-31
4last month
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Acq. date: 2026-02-24
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Statistics
Views
2048 since deposited on 2021-10-31
4last month
2last week
Acq. date: 2026-02-24
Citations