Publication:
Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGe
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2054 since deposited on 2021-10-31
3last month
Acq. date: 2026-05-18
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Statistics
Views
2054 since deposited on 2021-10-31
3last month
Acq. date: 2026-05-18
Citations