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Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGe

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2085 since deposited on 2021-10-31
20last month
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Acq. date: 2026-09-19

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2085 since deposited on 2021-10-31
20last month
4last week
Acq. date: 2026-09-19

Citations