Publication:

An integrated gas sensor technology using surface micro- machining

Date

2002
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorChan, P. C. H.
dc.contributor.authorYan, G. Z.
dc.contributor.authorSheng, L. Y.
dc.contributor.authorSharma, R. K.
dc.contributor.authorTang, Z.
dc.contributor.authorSin, J.K.O.
dc.contributor.authorHsing, I. M.
dc.contributor.authorWang, Y.
dc.date.accessioned2021-10-14T21:13:17Z
dc.date.available2021-10-14T21:13:17Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6093
dc.source.beginpage277
dc.source.endpage283
dc.source.issue2_3
dc.source.journalSensors and Actuators B
dc.source.volume82
dc.title

An integrated gas sensor technology using surface micro- machining

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles