Publication:

FINFET doping: fabrication and metrology challenges

Date

2009
Proceedings Paper
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T04:23:59Z
dc.date.available2021-10-18T04:23:59Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16421
dc.source.conferenceInternational Conference on Frontiers of Metrology and Characterization for Nanoelectronics
dc.source.conferencedate11/05/2009
dc.source.conferencelocationAlbany, NY US
dc.title

FINFET doping: fabrication and metrology challenges

dc.typeProceedings paper
dspace.entity.typePublication
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