Publication:

Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology

Date

2019
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorWesterveld, Wouter
dc.contributor.authorFigeys, Bruno
dc.contributor.authorGao, Hang
dc.contributor.authorHuang, Chih-Hsien
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorTroia, Benedetto
dc.contributor.authorHaouari, Rachid
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorLenci, Silvia
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecHaouari, Rachid::0000-0003-4809-2023
dc.contributor.orcidimecO'Callaghan, John::0000-0003-2313-8697
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2021-10-27T23:25:17Z
dc.date.available2021-10-27T23:25:17Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34434
dc.source.beginpage1
dc.source.conferenceEuropean Conference on Integrated Optics - ECIO
dc.source.conferencedate24/04/2019
dc.source.conferencelocationGhent Belgium
dc.source.endpage3
dc.title

Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
41925.pdf
Size:
1.22 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions