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Silicon nitride induced hydrogenation of silicon/silicon oxide interfaces for rear surface passivation of industrial-type thin solar cells

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dc.contributor.authorDekkers, Harold
dc.contributor.authorAgostinelli, Guido
dc.contributor.authorMa, Yue
dc.contributor.authorBeaucarne, Guy
dc.contributor.imecauthorDekkers, Harold
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.date.accessioned2021-10-16T15:43:49Z
dc.date.available2021-10-16T15:43:49Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12033
dc.source.beginpage736
dc.source.conferenceTechnical Digest 17th International Photovoltaic Science and Engineering Conference - PVSEC
dc.source.conferencedate3/12/2007
dc.source.conferencelocationFukuoka Japan
dc.source.endpage737
dc.title

Silicon nitride induced hydrogenation of silicon/silicon oxide interfaces for rear surface passivation of industrial-type thin solar cells

dc.typeProceedings paper
dspace.entity.typePublication
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