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Three-dimensional electrical probing of confined device volumes with sub-nanometer spatial resolution

Date

2021-08
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentb3031b8b-057c-4cd8-a386-6d314b66f241
cris.virtualsource.orcidb3031b8b-057c-4cd8-a386-6d314b66f241
dc.contributor.advisorVandervorst, Wilfried
dc.contributor.authorPandey, Komal
dc.date.accessioned2026-06-01T09:38:15Z
dc.date.available2026-06-01T09:38:15Z
dc.date.issued2021-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59492
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Three-dimensional electrical probing of confined device volumes with sub-nanometer spatial resolution

dc.typePHD thesis
dspace.entity.typePublication
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