Defect engineering for shallow n-type junctions in germanium: facts and fiction

dc.contributor.author	Simoen, Eddy
dc.contributor.author	Schaekers, Marc
dc.contributor.author	Liu, Jinbiao
dc.contributor.author	Luo, Jun
dc.contributor.author	Zhao, Chao
dc.contributor.author	Barla, Kathy
dc.contributor.author	Collaert, Nadine
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Schaekers, Marc
dc.contributor.imecauthor	Barla, Kathy
dc.contributor.imecauthor	Collaert, Nadine
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimec	Schaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimec	Collaert, Nadine::0000-0002-8062-3165
dc.date.accessioned	2021-10-23T15:00:06Z
dc.date.available	2021-10-23T15:00:06Z
dc.date.issued	2016
dc.identifier.issn	1862-6300
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/27322
dc.identifier.url	http://onlinelibrary.wiley.com/doi/10.1002/pssa.201600491/abstract
dc.source.beginpage	2799
dc.source.endpage	2808
dc.source.issue	11
dc.source.journal	Physica Status Solidi A
dc.source.volume	213
dc.title	Defect engineering for shallow n-type junctions in germanium: facts and fiction
dc.type	Journal article
dspace.entity.type	Publication
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