Publication:

Toward high-performance and reliable Ge channel devices for 2 nm node and beyond

Date

2020

Proceedings Paper

https://doi.org/10.1109/IEDM13553.2020.9372007

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Author(s)

Arimura, Hiroaki

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Capogreco, Elena

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Porret, Clément

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;

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Hikavyy, Andriy

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Boccardi, Guillaume

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Witters, Liesbeth

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Collaert, Nadine

;

Horiguchi, Naoto

Journal

na

Metrics

1899 since deposited on 2021-12-06

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Acq. date: 2025-12-15