Publication:

Toward high-performance and reliable Ge channel devices for 2 nm node and beyond

Date

2020
Proceedings Paper
https://doi.org/10.1109/IEDM13553.2020.9372007
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Author(s)

Arimura, Hiroaki  
;
Capogreco, Elena  
;
Vohra, Anurag  
;
Porret, Clément  
;
Loo, Roger  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Cott, Daire  
;
Boccardi, Guillaume  
;
Witters, Liesbeth  
;
Eneman, Geert  
;
Mitard, Jerome  
;
Collaert, Nadine  
;
Horiguchi, Naoto  

Journal

na

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