Publication:

Wet etching of Ruthenium: effect of thermal annealing

Date

2019
Meeting abstract
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHolsteyns, Frank
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.date.accessioned2021-10-27T12:12:30Z
dc.date.available2021-10-27T12:12:30Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33386
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC 2019)
dc.source.conferencedate1/04/2019
dc.source.conferencelocationPortland, OR USA
dc.title

Wet etching of Ruthenium: effect of thermal annealing

dc.typeMeeting abstract
dspace.entity.typePublication
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