Publication:
Characterisation of porous dielectric films by ellipsometric porosimetry
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Mogilnikov, K. P. | |
| dc.date.accessioned | 2021-10-14T12:40:10Z | |
| dc.date.available | 2021-10-14T12:40:10Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4089 | |
| dc.source.beginpage | 491 | |
| dc.source.endpage | 496 | |
| dc.source.issue | 4 | |
| dc.source.journal | Optica Applicata | |
| dc.source.volume | 30 | |
| dc.title | Characterisation of porous dielectric films by ellipsometric porosimetry | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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