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A new approach for the measurement of resistivity and cross-sectional area of an aluminium interconnect line: principle and applications
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2 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2053 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2053 since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations