Publication:
Defect generation in ultrathin SiON/ZrO2 gate dielectric stacks
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1926 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
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Metrics
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1926 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
Citations