Publication:
Defect generation in ultrathin SiON/ZrO2 gate dielectric stacks
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1927 since deposited on 2021-10-14
2last month
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Acq. date: 2026-01-11
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Views
1927 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2026-01-11
Citations