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Three dimensional compositional analysis of semiconductors with the Atom Probe

Date

2011-12
Dissertation
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dc.contributor.advisorVandervorst, Wilfried
dc.contributor.authorKoelling, Sebastian
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:55:05Z
dc.date.available2021-10-19T14:55:05Z
dc.date.embargo9999-12-31
dc.date.issued2011-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19191
dc.title

Three dimensional compositional analysis of semiconductors with the Atom Probe

dc.typePHD thesis
dspace.entity.typePublication
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