Publication:

Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

Date

2020
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorWouters, Lennaert
dc.contributor.authorMinj, Albert
dc.contributor.authorCelano, Umberto
dc.contributor.authorHantschel, Thomas
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorMinj, Albert
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecMinj, Albert::0000-0003-0878-3276
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-29T08:12:35Z
dc.date.available2021-10-29T08:12:35Z
dc.date.embargo9999-12-31
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36338
dc.identifier.urlhttps://parksystems.com/images/media/appnote/SSRM-SCM-in-HV_AppNote54_Park-Systems.pdf
dc.source.beginpage1
dc.source.endpage5
dc.source.journalPark Systems.com: Application Note #54
dc.title

Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
45670.pdf
Size:
942.41 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles