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Nanoindentation based method to determine the thermal expansion coefficients of low-k dielectrics
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3 since deposited on 2022-09-22
Acq. date: 2026-01-10
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1561 since deposited on 2022-09-22
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Acq. date: 2026-01-10
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3 since deposited on 2022-09-22
Acq. date: 2026-01-10
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1561 since deposited on 2022-09-22
2last month
Acq. date: 2026-01-10
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