Publication:

Experimental verification of a model based decomposition method for double dipole lithography

Date

2004
Proceedings Paper
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dc.contributor.authorEurlings, M.
dc.contributor.authorHsu, S.D.
dc.contributor.authorHendrickx, Eric
dc.contributor.authorop 't Root, W.
dc.contributor.authorLaidig, T.L.
dc.contributor.authorChiou, T.B.
dc.contributor.authorChen, A.
dc.contributor.authorChen, F.
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorFinders, J.
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.date.accessioned2021-10-15T13:22:47Z
dc.date.available2021-10-15T13:22:47Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8893
dc.source.beginpage1225
dc.source.conferenceOptical Microlithography XVII
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage1236
dc.title

Experimental verification of a model based decomposition method for double dipole lithography

dc.typeProceedings paper
dspace.entity.typePublication
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