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Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
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1902 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-26
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Views
1902 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-26
Citations