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Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Publication:
Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Date
1999
Proceedings Paper
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3599.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Caymax, Matty
;
Libezny, Milan
;
Blavier, G.
;
Brijs, Bert
;
Geenen, Luc
;
Vandervorst, Wilfried
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1900
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1900
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations