Publication:

UV-induced modification of fluorocarbon polymer for improvement of wet removal

Date

2014
Journal article
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorSimms, Ihsan
dc.contributor.authorYue, Henry
dc.contributor.authorBrown, Ian
dc.contributor.authorKesters, Els
dc.contributor.authorVereecke, Guy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-22T02:53:25Z
dc.date.available2021-10-22T02:53:25Z
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24108
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931713003419
dc.source.beginpage136
dc.source.endpage140
dc.source.journalMicroelectronic Engineering
dc.source.volume114
dc.title

UV-induced modification of fluorocarbon polymer for improvement of wet removal

dc.typeJournal article
dspace.entity.typePublication
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