Publication:

Investigation of substrate off-angle effects for (110)P-doped homoepitaxial CVD diamond films

Date

2012
Presentation
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dc.contributor.authorBalasubramaniam, Y.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorSoltani, A.
dc.contributor.authorJanssens, S.D.
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-20T10:04:25Z
dc.date.available2021-10-20T10:04:25Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20339
dc.source.conferenceHasselt Diamond Workshop - SBDD XVII
dc.source.conferencedate14/03/2012
dc.source.conferencelocationHasselt Belgium
dc.title

Investigation of substrate off-angle effects for (110)P-doped homoepitaxial CVD diamond films

dc.typeOral presentation
dspace.entity.typePublication
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