Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.

dc.contributor.author	Mistrik, J.
dc.contributor.author	Janicek, P.
dc.contributor.author	Taylor, A.
dc.contributor.author	Fendrych, F.
dc.contributor.author	Fekete, L.
dc.contributor.author	Jager, A.
dc.contributor.author	Nesladek, Milos
dc.contributor.imecauthor	Nesladek, Milos
dc.date.accessioned	2021-10-22T03:53:01Z
dc.date.available	2021-10-22T03:53:01Z
dc.date.embargo	9999-12-31
dc.date.issued	2014
dc.identifier.issn	0040-6090
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24264
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0040609014010426
dc.source.beginpage	230
dc.source.endpage	237
dc.source.journal	Thin Solid Films
dc.source.volume	571
dc.title	Spectroscopic ellipsometry characterization of nano-crystalline diamond films prepared at various substrate temperature and pulsed plasma frequencies using microwave plasma enhanced chemical vapor deposition apparatus with linear antenna deliverydelivery.
dc.type	Journal article
dspace.entity.type	Publication
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