Scalability of MOCVD-deposited Hafnium oxide

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Author(s)

Van Elshocht, Sven

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Carter, Richard

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Conard, Thierry

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De Gendt, Stefan

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Kerber, Andreas

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Lujan, Guilherme

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Richard, Olivier

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Shimamoto, Yasuhiro

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Metrics

2063 since deposited on 2021-10-15

Acq. date: 2025-12-09