Publication:

Scalability of MOCVD-deposited Hafnium oxide

Date

2003

Proceedings Paper

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Author(s)

Van Elshocht, Sven

;

Carter, Richard

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;

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Conard, Thierry

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;

De Gendt, Stefan

;

;

Kerber, Andreas

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;

Lujan, Guilherme

;

;

;

Richard, Olivier

;

;

Shimamoto, Yasuhiro

;

;

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2065 since deposited on 2021-10-15

Acq. date: 2026-05-02