Publication:

Mechanical behavior of porous thin low-k films during nanoindentation

Date

2019
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Okudur, Oguzhan Orkut  
;
Vanstreels, Kris  
;
Saleh, Ahmed Sobhi
;
Hangen, Ude
;
De Wolf, Ingrid  

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1922 since deposited on 2021-10-27
Acq. date: 2026-02-24

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1922 since deposited on 2021-10-27
Acq. date: 2026-02-24

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