Publication:
Defect-induced bandgap narrowing in low-k dielectrics
Date
| dc.contributor.author | Guo, X | |
| dc.contributor.author | Zheng, H | |
| dc.contributor.author | King, S | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Nishi, Y. | |
| dc.contributor.author | Shohet, J. | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T19:33:34Z | |
| dc.date.available | 2021-10-22T19:33:34Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25349 | |
| dc.identifier.url | http://scitation.aip.org/content/aip/journal/apl/107/8/10.1063/1.4929702 | |
| dc.source.beginpage | 82903 | |
| dc.source.issue | 8 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 107 | |
| dc.title | Defect-induced bandgap narrowing in low-k dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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