Publication:
C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature
Date
| dc.contributor.author | Blasco, X. | |
| dc.contributor.author | Petry, Jasmine | |
| dc.contributor.author | Nafria, M. | |
| dc.contributor.author | Aymerich, X. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T04:02:01Z | |
| dc.date.available | 2021-10-15T04:02:01Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7222 | |
| dc.source.conference | 13th Bi-Annual Conference on Insulating Films on Semiconductors - INFOS | |
| dc.source.conferencedate | 18/06/2003 | |
| dc.source.conferencelocation | Barcelona Spain | |
| dc.title | C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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