Publication:
Self-aligned fin cut last patterning scheme for fin arrays of 24nm pitch and beyond
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2082 since deposited on 2021-10-25
3last month
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Acq. date: 2025-12-16
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Metrics
Views
2082 since deposited on 2021-10-25
3last month
1last week
Acq. date: 2025-12-16
Citations