Publication:

Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorWu, Ming Fang
dc.contributor.authorDe Wachter, Jo
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorPattyn, H.
dc.contributor.authorLangouche, G.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorBender, Hugo
dc.contributor.authorTemst, K.
dc.contributor.authorWuyts, Bart
dc.contributor.authorBruynseraede, Y.
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-29T12:53:55Z
dc.date.available2021-09-29T12:53:55Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/469
dc.source.beginpage711
dc.source.conferenceMaterials Synthesis and Processing Using Ion Beams
dc.source.conferencedate29/11/1993
dc.source.conferencelocationBoston, MA USA
dc.source.endpage716
dc.title

Ion beam synthesis of buried CoxNi1-xSi2 layers in silicon

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
464.pdf
Size:
237.25 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions