Publication:

Attenuated PSM for EUV: Can they mitigate 3D mask effects?

Date

2018

Proceedings Paper

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Files

40689.pdf 2.06 MB

Author(s)

Erdmann, Andreas

;

Evanschitzky, Peter

;

;

Philipsen, Vicky

;

Hendrickx, Eric

;

Statistics

2028 since deposited on 2021-10-25

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Acq. date: 2026-01-26