Publication:
Integration issues of CMP
Date
| dc.contributor.author | Robinson, K.M. | |
| dc.contributor.author | Devriendt, Katia | |
| dc.contributor.author | Evans, D.R. | |
| dc.contributor.imecauthor | Devriendt, Katia | |
| dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
| dc.date.accessioned | 2021-10-15T15:50:59Z | |
| dc.date.available | 2021-10-15T15:50:59Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9514 | |
| dc.source.beginpage | 351 | |
| dc.source.book | Chemical-Mechanical Planarization of Semiconductor Materials | |
| dc.source.endpage | 418 | |
| dc.title | Integration issues of CMP | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |