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Impact of SiON tunnel layer composition on 3D NAND cell performance
Publication:
Impact of SiON tunnel layer composition on 3D NAND cell performance
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Breuil, Laurent
;
Nyns, Laura
;
Banerjee, Kaustuv
;
Vadakupudhu Palayam, Senthil
;
Subirats, Alexandre
;
Richard, Olivier
;
Conard, Thierry
;
Van den Bosch, Geert
;
Furnemont, Arnaud
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Acq. date: 2025-12-10
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2050
since deposited on 2021-10-27
2
last month
Acq. date: 2025-12-10
Citations