Publication:

Lock-in thermal laser stimulation for non-destructive failure localization in 3-D devices

Date

2017
Journal article
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dc.contributor.authorJacobs, Kristof J.P.
dc.contributor.authorWang, Teng
dc.contributor.authorStucchi, Michele
dc.contributor.authorGonzalez, Mario
dc.contributor.authorCroes, Kristof
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorJacobs, Kristof J.P.
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecJacobs, Kristof J.P.::0000-0002-1081-3633
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-24T06:12:28Z
dc.date.available2021-10-24T06:12:28Z
dc.date.issued2017
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28579
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271417302226
dc.source.beginpage188
dc.source.endpage193
dc.source.journalMicroelectronics Reliability
dc.source.volume76-77
dc.title

Lock-in thermal laser stimulation for non-destructive failure localization in 3-D devices

dc.typeJournal article
dspace.entity.typePublication
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