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Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

Date

2010
Meeting abstract
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dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorMeszaros, A.
dc.contributor.authorKis-Szabo, K.
dc.contributor.authorTutto, P.
dc.contributor.authorPap, A.
dc.contributor.authorPavelka, T.
dc.contributor.authorWilson, M.
dc.contributor.authorFindlay, A.
dc.contributor.authorJastrzebski, L.
dc.contributor.authorLagowski, J.
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.date.accessioned2021-10-18T16:17:10Z
dc.date.available2021-10-18T16:17:10Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17086
dc.source.beginpage917
dc.source.conference217th ECS Meeting
dc.source.conferencedate25/04/2010
dc.source.conferencelocationVancouver Canada
dc.title

Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance

dc.typeMeeting abstract
dspace.entity.typePublication
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