Publication:

Epitaxial growth of magnetron sputtered NiAl on Ge mediated by native GeOx

Date

2024
Journal article
https://doi.org/10.1088/1361-6463/ad164b
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dc.contributor.authorBen Chroud, Mohamed
dc.contributor.authorKorytov, Maxim
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorSwerts, Johan
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorCarpenter, Robert
dc.contributor.imecauthorBen Chroud, Mohamed
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorCarpenter, Robert
dc.contributor.orcidimecBen Chroud, Mohamed::0000-0003-3312-7342
dc.contributor.orcidimecKorytov, Maxim::0009-0001-9313-7019
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecTemst, Kristiaan::0000-0002-1377-5097
dc.contributor.orcidimecCarpenter, Robert::0000-0003-0101-5952
dc.date.accessioned2024-03-05T10:52:52Z
dc.date.available2024-01-21T17:34:08Z
dc.date.available2024-03-05T10:52:52Z
dc.date.issued2024
dc.description.wosFundingTextThe authors would like to acknowledge the interesting discussions with A Vantomme on silicides and germanides, and C Porret for our discussion on the growth of epitaxial Ge. We also acknowledge funding from KU Leuven (Grant No. C14/18/074) and the Research Foundation-Flanders (FWO). The authors declare no conflicts of interest.
dc.identifier.doi10.1088/1361-6463/ad164b
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43435
dc.publisherIOP Publishing Ltd
dc.source.beginpageArt. 135309
dc.source.endpageN/A
dc.source.issue13
dc.source.journalJOURNAL OF PHYSICS D-APPLIED PHYSICS
dc.source.numberofpages7
dc.source.volume57
dc.subject.keywordsCOSI2
dc.title

Epitaxial growth of magnetron sputtered NiAl on Ge mediated by native GeOx

dc.typeJournal article
dspace.entity.typePublication
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