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Sims depth profiling with sub-nm resolution (?)
Publication:
Sims depth profiling with sub-nm resolution (?)
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Date
2011
Meeting abstract
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23198.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Douhard, Bastien
;
Delmotte, Joris
;
Vincent, Benjamin
Journal
Abstract
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1879
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Acq. date: 2025-12-11
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Metrics
Views
1879
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-11
Citations