Publication:
Cryogenic performance of ultrathin oxide CMOS capacitors with in situ doped p+ poly-Si1-xGex and poly Si gate materials
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1994 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1994 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations