Publication:

Selective laser annealing for improved SiGe MEMS structural layers at 210°C

Date

2010
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorAbdel Aziz, Ahmed
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorSedky, Sherif
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecVan Hoof, Chris::0000-0002-4645-3326
dc.date.accessioned2021-10-18T16:11:30Z
dc.date.available2021-10-18T16:11:30Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17062
dc.source.beginpage324
dc.source.conference23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate24/01/2010
dc.source.conferencelocationHong Kong China
dc.source.endpage327
dc.title

Selective laser annealing for improved SiGe MEMS structural layers at 210°C

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions