Publication:
Assessment of the near-surface profiling capabilities of SIMS
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Fruehauf, Jens | |
| dc.contributor.author | Ross, I.M. | |
| dc.contributor.author | Cullis, A. | |
| dc.contributor.author | Vandenberg, J.A. | |
| dc.contributor.author | Bergmaier, A. | |
| dc.contributor.author | Dollinger, G. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T07:29:02Z | |
| dc.date.available | 2021-10-15T07:29:02Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8330 | |
| dc.source.beginpage | 165 | |
| dc.source.conference | Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. | |
| dc.source.conferencedate | 27/04/2003 | |
| dc.source.conferencelocation | Santa Cruz, CA USA | |
| dc.title | Assessment of the near-surface profiling capabilities of SIMS | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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