Publication:

PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2610629
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dc.contributor.authorAnsari, Irfan
dc.contributor.authorFeutmba, Gilles F.
dc.contributor.authorDieussaert, Emiel
dc.contributor.authorGeorge, John P.
dc.contributor.authorBeeckman, Jeroen
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorAnsari, Irfan
dc.contributor.imecauthorFeutmba, Gilles F.
dc.contributor.imecauthorDieussaert, Emiel
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidextGeorge, John P.::0000-0002-8499-9602
dc.contributor.orcidextBeeckman, Jeroen::0000-0002-0711-2465
dc.contributor.orcidimecFeutmba, Gilles F.::0000-0001-8648-5819
dc.contributor.orcidimecDieussaert, Emiel::0000-0003-2732-7751
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned2023-08-24T09:41:18Z
dc.date.available2023-06-20T10:33:21Z
dc.date.available2023-08-24T09:41:18Z
dc.date.embargo2022-03-05
dc.date.issued2022
dc.description.wosFundingTextThis work was supported by the EU commission through Grant agreement No. 732894 (FET proactive HOT) and through the UGent grant BOFGOA2020000103. Gilles F. Feutmba acknowledges support and funding as an SB-PhD Fellow of the research foundation{Flanders (FWO, grant number 1S68218N).
dc.identifier.doi10.1117/12.2610629
dc.identifier.eisbn978-1-5106-4880-7
dc.identifier.isbn978-1-5106-4879-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41806
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1200411
dc.source.conferenceConference on Integrated Optics - Devices, Materials, and Technologies XXVI at SPIE OPTO Conference
dc.source.conferencedateJAN 22-FEB 28, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalProceedings of SPIE
dc.source.numberofpages4
dc.source.volume12004
dc.subject.keywordsSILICON
dc.title

PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits

dc.typeProceedings paper
dspace.entity.typePublication
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