A DLTS study of SiO2 and SiO2/SiNx surface passivation of silicon

Publication:

2011

Journal article

Author(s)

;

Gong, Chun

;

;

Van Kerschaver, Emmanuel

;

;

Journal of the Electrochemical Society

1955 since deposited on 2021-10-19

1last month

Acq. date: 2026-02-28